this post was submitted on 22 Oct 2024
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This sounds like a very large feature size given the existence of 3-5 nm process nodes. Or am I missing something here?
The photoresist is a component of photolithography, but doesn't determine the process node on its own. The 120nm quoted here is quite advanced compared to the capitalist products I have found advertised (200nm or so).
https://en.m.wikipedia.org/wiki/Photolithography
The process node is not a real resolution, just a marketing term, feature sizes for 5 nm are in the few tens of nanometers. And chinese foundry SMIC uses quadruple patterning to get those feature sizes from less powerful lithography tools.