this post was submitted on 22 Oct 2024
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This sounds like a very large feature size given the existence of 3-5 nm process nodes. Or am I missing something here?
The process node is not a real resolution, just a marketing term, feature sizes for 5 nm are in the few tens of nanometers. And chinese foundry SMIC uses quadruple patterning to get those feature sizes from less powerful lithography tools.